EWOD silicon biosensor for multiple nucleic acids analysis

In this paper, a miniaturized biosensor containing 96 silicon microchambers electroloaded with nano‐volumes of liquid (EW‐chip) is presented. The liquid electroloading is achieved by the appropriate modulation of interface properties. The surface chemistries have been studied to guarantee effective interface properties for both electrowetting on dielectric actuation and biocompatibility versus biochemical reactions. The silicon microchambers are 200 nl in volume and are connected to a specific system of electrodes able to deliver liquid sample on each well. The device also integrates temperature sensors and heaters to perform biochemical reactions. On that, the effectiveness of this device has been successfully proven towards the nucleic acids detection via real‐time polymerase chain reaction amplification. Hepatitis B virus genome target has been used to assess the device performance. Results show very uniform amplification over the 96 microchambers without any cross‐contamination process. These features make this system a very appealing potential solution for genetic point‐of‐care devices where a high level of parallelism of analysis is required.