Sensing devices based on ZnO films deposited by RF sputtering have been investigated. Their sensing properties have been found dependent on film deposition parameters and post-deposition treatments such as thermal annealing and sensor working temperature. The fabricated sensors were found suitable for automotive applications in the control and prevention of CO contamination into the vehicle cabin and detection of hydrogen combustible gas leaks in fuel cell cars
RF sputtered ZnO films for automotive applications
MICALI, GIUSEPPE;NERI, Giovanni
2009-01-01
Abstract
Sensing devices based on ZnO films deposited by RF sputtering have been investigated. Their sensing properties have been found dependent on film deposition parameters and post-deposition treatments such as thermal annealing and sensor working temperature. The fabricated sensors were found suitable for automotive applications in the control and prevention of CO contamination into the vehicle cabin and detection of hydrogen combustible gas leaks in fuel cell carsFile in questo prodotto:
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