In this paper the development of a measurement setup for resistive films able to perform sensing tests within a wide resistance range is reported. The system is fully automated, allowing to perform time-consuming sensing tests without operator supervision. Here, a thick film planar-type sensor was investigated. Cu-doped SnO2 was used as sensing element deposited by screen printing on the planar ceramic substrate provided with Pt interdigited contacts. First results showed a predictable behavior vs. low values of humidity and a satisfactory attitude to thermal stress. The system is a promising tool both in sensing performance film evaluation and in device prototype characterization. © 2014 Springer International Publishing Switzerland.

A High-Resistance Measurement Setup for MOX Sensing Materials Characterization.

LATINO, MARIANGELA;BONAVITA, ANNA;DONATO, Nicola;NERI, Giovanni
2014-01-01

Abstract

In this paper the development of a measurement setup for resistive films able to perform sensing tests within a wide resistance range is reported. The system is fully automated, allowing to perform time-consuming sensing tests without operator supervision. Here, a thick film planar-type sensor was investigated. Cu-doped SnO2 was used as sensing element deposited by screen printing on the planar ceramic substrate provided with Pt interdigited contacts. First results showed a predictable behavior vs. low values of humidity and a satisfactory attitude to thermal stress. The system is a promising tool both in sensing performance film evaluation and in device prototype characterization. © 2014 Springer International Publishing Switzerland.
2014
9783319006833
9783319006840
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Utilizza questo identificativo per citare o creare un link a questo documento: https://hdl.handle.net/11570/2667384
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