This paper presents a study of the effect of FIB post-fabrication processing of in-house fabricated, unpackaged Super- Luminescent Diodes. The interest is on facet patterning and amorphisation, and on (sub-)wavelength gratings deposited on the device facet. The operational characteristics of the devices before and after manipulation will be discussed.
FIB post-fabrication processing of Super Luminescent Diodes
CAUSA, Federica;
2008-01-01
Abstract
This paper presents a study of the effect of FIB post-fabrication processing of in-house fabricated, unpackaged Super- Luminescent Diodes. The interest is on facet patterning and amorphisation, and on (sub-)wavelength gratings deposited on the device facet. The operational characteristics of the devices before and after manipulation will be discussed.File in questo prodotto:
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