AlN MEMS Transducer Interface Enabled by LoPy 4 Wireless Module

In this study, we investigate the adoption of Aluminum Nitride (AlN) Micro-Electro-Mechanical Systems (MEMS) as an energy-generating vibrating sensor for measurement systems, offering an intriguing alternative to traditional battery-powered sensors. The inherent piezoelectric properties of AlN enable the conversion of mechanical energy into electrical signals, providing a sustainable solution for wireless sensor nodes. Experimental setups were conducted to evaluate the performance of the fabricated AlN MEMS sensor. The generated voltage was measured using appropriate laboratory equipment and a LoPy4 ADC module by Pycom, ensuring reliable data acquisition. The sensor achieved a maximum open-circuit peak-to-peak output voltage of approximately 1.4 V with the LoPy4 at a resonant frequency of 65 Hz and an acceleration amplitude of ~0.65 m/s2. The findings demonstrate that the AlN MEMS sensor can function effectively as an energy-generating device, thereby reducing the overall power consumption of wireless measurement systems. This provides a renewable and maintenance-free solution for long-term sensor deployment in various applications, including structural health monitoring, environmental sensing, industrial machinery diagnostics, smart infrastructure, preventive conservation, and cultural heritage preservation.