Microfabrication of Silicon Hydrogenated Thin Targets for Multi-MeV Laser-Driven Proton Acceleration

An ad hoc microfabrication technique was employed for the optimization of thin hydrogenated silicon membranes for the first experimental application in the field of laser-driven proton acceleration. The tetra methyl ammonium hydroxide wet etching and further microfabrication processes allowed the optimization of the target structure and geometry. Samples were doped in a H2 environment during an annealing process at 420 C in order to increase the hydrogen concentration in the silicon matrix. This solution enabled the production of high-current (about 100mA at 1m from the source) and multi-MeV proton beams. # 2011 The Japan Society of Applied Physics