Low frequency noise in nMOSFETs with subnanometer EOT hafnium-based gate dielectrics

This paper focuses on the noise behavior of nMOSFETs with high-k gate dielectrics (SiON/HfO 2) with an equivalent oxide thickness of 0.92 nm and using metal (TiN/TaN) as gate material. From the linear dependence of the normalized drain noise on the gate voltage overdrive we conclude that the 1/f noise is dictated by mobility fluctuations. This behavior is mainly ascribed to the reduced mobility due to the low interfacial thickness of 0.4 nm and the Hf-related defects. The gate current is more sensitive to RTS noise with respect to the drain current noise. Cross-correlation measurements between drain and gate noise are used as a tool for discriminating between noise mechanisms which generate different fluctuation levels at the gate and drain terminal. © 2006.