In this work, numerical techniques based on Shooting procedure, Relaxation scheme and Collocation technique have been used for recovering the profile of the membrane of a 1D electrostatic Micro-Electro-Mechanical-Systems (MEMS) device whose analytic model considers |mathbf {E}| proportional to the membrane curvature. The comparison among these numerical techniques has put in evidence the pros and cons of each numerical procedure. Furthermore, useful convergence conditions which ensure the absence of ghost solutions, and a new condition of existence and uniqueness for the solution of the considered differential MEMS model, are obtained and discussed.

Electrostatic Micro-Electro-Mechanical-Systems (MEMS) Devices: A Comparison among Numerical Techniques for Recovering the Membrane Profile

Jannelli A.
Secondo
;
2020-01-01

Abstract

In this work, numerical techniques based on Shooting procedure, Relaxation scheme and Collocation technique have been used for recovering the profile of the membrane of a 1D electrostatic Micro-Electro-Mechanical-Systems (MEMS) device whose analytic model considers |mathbf {E}| proportional to the membrane curvature. The comparison among these numerical techniques has put in evidence the pros and cons of each numerical procedure. Furthermore, useful convergence conditions which ensure the absence of ghost solutions, and a new condition of existence and uniqueness for the solution of the considered differential MEMS model, are obtained and discussed.
2020
File in questo prodotto:
File Dimensione Formato  
3173906.pdf

accesso aperto

Tipologia: Versione Editoriale (PDF)
Licenza: Creative commons
Dimensione 3.92 MB
Formato Adobe PDF
3.92 MB Adobe PDF Visualizza/Apri
Pubblicazioni consigliate

I documenti in IRIS sono protetti da copyright e tutti i diritti sono riservati, salvo diversa indicazione.

Utilizza questo identificativo per citare o creare un link a questo documento: https://hdl.handle.net/11570/3173906
Citazioni
  • ???jsp.display-item.citation.pmc??? ND
  • Scopus 21
  • ???jsp.display-item.citation.isi??? 19
social impact